MaxNが無くなればいいの?
たぶん、
 MaxN:=round(10*MAX_PRIMES*ln(MAX_PRIMES) );
 PrimeCnt:=1;
 with ETblMk(MaxN) do try
  for i := 2 to MaxN-1 do

この4行を

 PrimeCnt:=1;
 with ETblMk(round(10*MAX_PRIMES*ln(MAX_PRIMES) )) do try
  for i := 2 to Size-1 do

こうすりゃいいでしょ